 |
ABOUT | PRODUCTS | SERVICES | NEWS | JOBS | REFERENCES | CONTACT |
PRODUCTS » Mask Vendor Connectivity (MaVen)
Electronic Mask Ordering & Repair, Cleaning, ...
The RSM mask house interface provides for data exchange with mask suppliers using the SEMI standard P10. Reticle records in the RSM database are automatically created when the reticle order file is send to the mask-house. The progress of the manufacturing process in the mask house, e.g. production status, estimated time of arrival (ETA), etc. can be monitored with the RSM. Upon delivery of the reticle the electronic Certificate of Conformance (CofC) is automatically validated and verified with the original reticle order file. The RSM then supports the corresponding authority to sign-off the new reticle for production use in the fab.
Minimizing operator interaction reduces human errors and increases predictability and ramp up of your products.
Features:
- Automatically send/receive data from reticle suppliers
- Supports SEMI P10 standard and mask vendor specific formats
- User interface (GUI) for all relevant data
- Monitoring of reticle manufacturing & shipment progress
- Acknowledge reticle & data receipt
- Certificate of Conformance (CofC) Validation
- Data import of relevant reticle data, e.g. Critical dimension (CD), registration data, phase and transmission detail data
- Demographics for reticles, inspection tools, etc.
Mask vendor tracking
Mask supplier score cards for each mask vendor:- Cycle time data, performance to schedule
- Corrective action reports and scores
- First pass yield, return rate, audit score, ...
Back to our product overview.